JPH0418617B2 - - Google Patents
Info
- Publication number
- JPH0418617B2 JPH0418617B2 JP8739984A JP8739984A JPH0418617B2 JP H0418617 B2 JPH0418617 B2 JP H0418617B2 JP 8739984 A JP8739984 A JP 8739984A JP 8739984 A JP8739984 A JP 8739984A JP H0418617 B2 JPH0418617 B2 JP H0418617B2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- air
- sensor
- air chamber
- sampler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005070 sampling Methods 0.000 claims description 18
- 238000012544 monitoring process Methods 0.000 claims description 9
- 238000009423 ventilation Methods 0.000 claims description 8
- 239000000428 dust Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 238000005192 partition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8739984A JPS60230033A (ja) | 1984-04-27 | 1984-04-27 | 多点モニタリングサンプラ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8739984A JPS60230033A (ja) | 1984-04-27 | 1984-04-27 | 多点モニタリングサンプラ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60230033A JPS60230033A (ja) | 1985-11-15 |
| JPH0418617B2 true JPH0418617B2 (en]) | 1992-03-27 |
Family
ID=13913790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8739984A Granted JPS60230033A (ja) | 1984-04-27 | 1984-04-27 | 多点モニタリングサンプラ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60230033A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62129733A (ja) * | 1985-12-02 | 1987-06-12 | Fujita Corp | 気体の多点サンプリング装置 |
| US6167107A (en) * | 1999-07-16 | 2000-12-26 | Particle Measuring Systems, Inc. | Air pump for particle sensing using regenerative fan, and associated methods |
-
1984
- 1984-04-27 JP JP8739984A patent/JPS60230033A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60230033A (ja) | 1985-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |